화학공학소재연구정보센터
Materials Science Forum, Vol.483, 905-908, 2005
A 4H-SiC BJT with an epitaxially regrown extrinsic base layer
4H-SiC BJTs were fabricated using epitaxial regrowth instead of ion implantation to form a highly doped extrinsic base layer necessary for a good base ohmic contact. A remaining p(+) regrowth spacer at the edge of the base-emitter junction is proposed to explain a low current gain of 6 for the BJTs. A breakdown voltage of 1000 V was obtained for devices with Al implanted JTE.