화학공학소재연구정보센터
Materials Science Forum, Vol.483, 1005-1008, 2005
A 3.5 kV thyristor in 4H-SiC with a JTE periphery
Overcoming the physical limits of silicon, silicon carbide shows a high potential for making high voltage thyristors. After a simulation based optimization of the main thyristor parameters, including JTE protection and a SiO2 layer passivation, 4H-SiC GTO thyristors were realized and characterized. Designed for a theoretical blocking capability of nearly 6 kV, the electrical characterization of all device structures revealed a maximum blocking voltage of 3.5 kV. Comparing simulation and measurement suggests that a negative oxide charge density of 2x10(12) cm(-2) causes the decrease in electrical strength.