The self-lubricating composite films were deposited on Inconel 718 by Hollow Cathode Plasma Jet (HCPJ). These composite materials consist of chrome nickel alloy matrix and Ag, BaF2/CaF2 solid lubricants. The Cr2O3-NiCr-Ag composite thin film was crystallized and had the main peaks of Cr2O3 (012) and Ag (111). The deposition rate of 200 nm/min by HCPJ was much faster than the ordinary R.F. planar magnetron sputtering. The surface roughness of coated shaft was 30 nm.