Free-standing CVD diamond films were prepared under the substrate temperature in the range of 850-1050 degrees C. Macro- and micro-textures of the films were investigated based on the SEM observation as well as on the ODF and EBSD analysis. It was found that certain growth selection process appeared during diamond deposition which, however, did not lead to a strong film texture. It is indicated that strong fluctuation of growth ratio V(< 100 >)/V(< 111 >) and frequent growth twinning during film deposition resulted in randomization effect of grain orientations, which can be transformed by adjusting the parameters of film preparation.