It has been revealed that in Iridium influenced be severe plastic deformation (SPD) a ultrafine grained (UFG) structure is formed (the grain size of 20-30 nm), but in the bodies of grains there are practically no defects of structure, however, after irradiation a subgrain structure, (subgrain size of 3-5 nm) is formed, and in the bodies of subgrains there are defects. The subgrain structure was also revealed in UFG Nickel and Copper after SPD (subgrain size of 3-15 nm), but in the latter case the observed boundary region is broader and subgrain are highly disoriented.