화학공학소재연구정보센터
Materials Science Forum, Vol.505-507, 271-276, 2006
Fabrication of rolling mold for a 200 mu m microlens array by 3D LIGA-like processes
This paper presents a series of three dimensional (3D) LIGA-like processes to fabricate microlens arrays on a cylindrical substrate. The processes consist of design of mask and rotating mechanism, coating of photoresist, 3D UV lithography, development and hardening, and electroforming. It transfers microlens array pattern to a phi 76mm cylindrical stainless steel substrate intended for use as a rolling mold via electroforming. Process technologies are investigated and experiments are design and conducted as a proof of concept. Experimental results showed that phi 200 mu m microlens arrays can be fabricated on the substrate with good repeatability. The microlens pattern transferred to the 100 mu m-thick film showed the feasibility and stability of the 3D lithography process.