화학공학소재연구정보센터
Materials Science Forum, Vol.510-511, 146-149, 2006
Appearance of indium oxide nanorods in MOCVD growth
We report on the first synthesis of nanosized In2O3 rods using the TEI as a precursor in the presence of oxygen. The samples were characterized by means of X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy-dispersive X-ray spectroscopy. XRD analysis revealed that the products are In2O3 phase with a tetragonal cubic structure. SEM analysis indicated that the obtained nanorods have a circular cross section and a diameter in the range of 50-150 nm.