Nanoporous SiC membrane was developed on the porous alumina plate for the hydrogen separation using preceramic polymers such as polyphenylcarbosilane. The prepared preceramic polymers were characterized with FT-IR, TGA, GPC and XRD. Nanoporous SiC membrane was derived from the preceramic polymer using a spin coating method. The SiC membrane spin coated using 20 wt.% of polyphenylcarbosilane solution in cyclohexane does not show any cracks on the surface after heat treatment at 800 degrees C. The average thickness of the SiC membrane is about 1 mu m. SiC coated porous alumina possesses asymmetric pore size distribution. There are micropores that originated from porous alumina substrate, and nanopores that derived from amorphous state of SiC membranes. The pore size distribution measurement showed that the sample contains 1-3 nm sized nano pores.