Materials Science Forum, Vol.517, 135-140, 2006
Surface morphology of anatase TiO2 thin film by sol-gel method
Sol-gel processing route has been used for the production of thin films from titanium isopropoxide (TIP). The surface properties and statistics results have been characterized by AFM; the coating process has been examined using SEM and optical microscope. The structure phase of TiO2 has been analyzed by XRD; the composition of TiO2 has been estimated through EDS; the thickness of film has been measured by polarized microscope in an interferometric technique. The coating films are always crystallined in the anatase structure with circular particles in nanometer size.