In this study, we have investigated the application of dry ice blasting to remove fine particles adhering to surfaces and examined the removal process. The removal efficiency, area, and frequency have been analyzed using images captured with a high-speed microscope camera. In addition, the temperature of the dry ice jet has been measured in order to evaluate the dry ice particles and their effects on the particle removal process. The removal processes due to the impacts of primary dry ice particles and their agglomerates occurred in two stages corresponding to slow and rapid particle removals. High removal efficiency was achieved when the impacts of the agglomerates were dominant during the particle removal at approximately -70 degrees C. Furthermore, we have investigated the effects of the jet flow rate on the removal area and frequency and proposed a system parameter to determine the optimum jet flow rate for efficient particle removal. (C) 2011 Elsevier B.V. All rights reserved.