Low oxygen content TiNi alloy powder was produced from TiNi alloy scraps by three types of deoxidation after the hydrogenation-dehydrogenation (HDH) process. The TiNi alloy scrap had a Ti:Ni weight ratio of 7:3. After the HDH process, the TiNi alloy powder was found to comprise alpha-Ti and Ti2Ni phases. It was also confirmed that the hydrogenation process of Ti-Ni alloy showed lower exothermal temperatures than that of pure Ti. After the process of contact deoxidation in the solid state, the oxygen content of the TiNi alloy powder was 1980 ppm. This deoxidized powder was treated again by the non-contact deoxidation process as a result of which the oxygen content decreased further to 1260 ppm. Applying only non-contact deoxidation after the HDH process allowed us to obtain an oxygen content of 1280 ppm, which is the same as that of the TiNi alloy powder obtained by both the contact and the non-contact deoxidation. (C) 2013 Elsevier B.V. All rights reserved.