Solid-State Electronics, Vol.68, 22-26, 2012
N-doped ZnO based fast response ultraviolet photoconductive detector
We report a study on the fabrication and characterization of ultraviolet photodetectors based on N-doped ZnO films. Highly oriented N-doped ZnO films with 10 at.% N doping are deposited using spray pyrolysis technique onto glass substrates. The photoconductive UV detector based on N-doped ZnO thin films, having a metal-semiconductor-metal (MSM) configuration are fabricated by using Al as a contact metal. I-V characteristic under dark and UV illumination, spectral and transient response of ZnO and N-doped ZnO photodetector are studied. The photocurrent increases linearly with incident power density by more than two orders of magnitude. The photoresponsivity (580 A/W at 365 nm with 5 V bias, light power density 2 mu W/cm(2)) is much higher in the ultraviolet region than in the visible. (C) 2011 Elsevier Ltd. All rights reserved.