This study is focused on the elaboration of 8 mol.% yttria stabilized zirconia (8YSZ) thin films onto porous supporting NiO-8YSZ anode substrates using electrostatic spray deposition (ESD), and their microstructural and electrical characterizations. ESD allows a good control of the stoichiometry and the morphology of the films. Dense films were obtained from both solutions and suspensions by varying substrate temperature, solution flow rate, concentration, proportions of solvents and deposition time. Structure and microstructure of the films, characterized by XRD and SEM, respectively, are discussed in the paper. The electrical properties of the films obtained from suspension, determined using an original calibration method of a bulk platinum micro-electrode, were found identical to that of a bulk reference sample. (C) 2012 Elsevier B.V. All rights reserved.