PbZrxTi(1-x)O3 (PZT) ferroelectric ceramic samples have been charged with hydrogen at a temperature of 400 degrees C. The resulting hydrogen depth profiles have been determined both by secondary ion mass spectrometry (SIMS) and nuclear reaction analysis using the N-15 beam (N-15 method) at and above the resonance energy of 6.4 MeV. After charging, the hydrogen concentration was found to be increased in the near surface region. The hydrogen concentration determined by the N-15 method revealed that the concentration decreased with increasing fluences. However, at higher fluences the remaining hydrogen concentration was constant and amounts to about half of the value estimated at the lowest fluence. Infrared spectroscopy measurements indicated the existence of a polar hydroxyl bond OH-. (C) 2013 Elsevier B.V. All rights reserved.