Cu2ZnSn(S1-xSex)(4) thin films have been synthesized using a simple annealing process of vacuum deposited precursors under selenium atmosphere. Scanning electron microscopy as well as Raman spectroscopy exhibit high quality layers without minors phases. Energy dispersive spectroscopy in a transmission electron microscope however reveals the presence of ZnS1-xSex that is not easily distinguishable with other techniques of detection. Thin film Cu2ZnSn(S1-xSex)(4) based solar cells have been completed using a classical Cu2ZnSn(S1-xSex)(4)/CdS/ZnO structure. Power conversion efficiency of 6.0% has been reached. (C) 2012 Elsevier B.V. All rights reserved.