Room temperature fabrication of highly textured hydrogen and tungsten co-doped ZnO film for solar cell applications

Wang YF; Zhang XD; Zhang H; Huang Q; Yang F; Meng XD; Wei CC; Zhao Y

Solar Energy Materials and Solar Cells, Vol.121, 49-52, 2014

DOI10.1016/j.solmat.2013.10.025 Export Citation

Room temperature fabrication of highly textured hydrogen and tungsten co-doped ZnO film for solar cell applications

Wang YF, Zhang XD, Zhang H, Huang Q, Yang F, Meng XD, Wei CC, Zhao Y

In this paper highly textured hydrogen and tungsten co-doped ZnO (HWZO) thin films were obtained through post-etching room temperature fabricated HWZO film. The influences of both the sputtering power and the working pressure on the structural and morphological properties e.g. light trapping of HWZO were systematically evaluated. Higher haze value and EQE for mu c-Si:H solar cell showed that HWZO film possessed a uniform textured surface and enhanced light scattering compared to the commercial SnO2: F thin films. (C) 2013 Elsevier B.V. All rights reserved.

Keywords:Transparent conductive oxides;H,W co-doped ZnO;Magnetron sputtering;Light trapping;Thin film solar cells