We report transmittance and conductivity measurements of aluminum-doped zinc oxide films grown by atomic layer deposition. The results show that the films have 80-90% transmittance in the visible region and good transmittance in the infrared. To our knowledge, this is the first time that the transmittance of aluminum-doped zinc oxide is reported to extend beyond 2500-5000 nm. Following annealing, an optimal sheet resistance of 25 Omega/square was obtained for a 575 nm thick film with a carrier density of 2.4 x 10(20) cm(-3) without compromising the transmittance in the visible regime. (C) 2012 Elsevier Ltd. All rights reserved.