During the development of refractory alloy coatings for protective purposes at high temperature under oxygen-containing atmospheres, previous studies noted and examined the internal oxidation phenomenon for Mo-Ru and Ru-Ta coatings. The internally oxidized zone shows a laminated structure, consisting of alternating oxygen-rich and deficient layers stacked with a general orientation. Previous studies proposed a forming mechanism. To investigate in detail, Ru-Ta coatings were prepared with various rotating speeds of a substrate-holder. The coatings were annealed at 600 degrees C in an atmosphere continuously purgedwith 1% O-2-99% Ar mixed gas for 30 min. Transmission electron microscopy was used to examine the laminated-layer periods. Auger electron spectroscopy depth profiles certified the periodical variation of the related constituents. X-ray photoelectron spectroscopy proved the valence variation of Ta in the near surface, accompanied by the introduction of oxygen ions. The inward diffusion of oxygen was dominated by lattice diffusion. (C) 2012 Elsevier B. V. All rights reserved.