Single-crystalline-like epitaxial germanium thin films with hall mobility values as high as 833 cm(2)/Vs have been demonstrated on inexpensive polycrystalline metallic substrates. The dependence of mobility of p-type and n-type germanium films on the deposition temperature has been examined and correlated to microstructural changes. The importance of crystallographic orientation of Ge to achieve these high mobility values has been verified. The mobilities of the epitaxial germanium films on the film thickness for p-type and n-type films with multi-layer architecture with different epitaxial intermediate layers have been investigated. Results show that the increased mobility with increasing germanium film thickness is not just due to crystallographic texture improvement, but could also be a result of decreasing defect density. (C) 2012 Elsevier B. V. All rights reserved.