High-quality piezoelectric Ba(Zr0.2Ti0.8)O-3-50(Ba0.7Ca0.3)TiO3 films with very dense and homogenous microstructure were fabricated using chemical solution infiltration into porous screen-printed films. The films with a thickness of 10 mu m exhibited high relative permittivity of 2380, low dielectric loss of 1.6% (at 10 kHz), large remanent polarization of 22 mu C/cm(2), and large longitudinal piezoelectric constant d(33) of 220 pC/N, which is even better than the case of lead-based piezoelectric films. The excellent electrical properties make the films a promising candidate for practical applications in lead-free microdevices such as piezoelectric microelectromechanical systems. (C) 2012 Elsevier B. V. All rights reserved.