To develop electroconductive solid lubricant films with low surface-free energy, multilayer and mixed films composed of gold, which has high electrical conductivity, and polytetrafluoroethylene (PTFE), which has low surface energy, were deposited by biased radio-frequency sputtering. Their surface-free energies, nanoindentation, and tribological properties were then evaluated. These gold and PTFE multilayer and mixed films were found to have low surface-free energies and high electrical conductivities. The electrical resistivities of the mixed films with lower fluorine and carbon contents were approximately 0.02 Omega.cm. The contact angles of the multilayer and mixed films with water were large, and their surface-free energy could be reduced to 29 mN/m by increasing their fluorine and carbon contents. The friction coefficients of the multilayer films deposited at a lower power were as low as mu=0.05 in air, as revealed by a low-load friction test. The friction properties and wear durability of the multilayer and mixed films deposited under a higher power were superior under boundary lubrication with distilled water, tap water, and polyalphaolefin without and with glycerol monooleate as an additive, as clarified by a high-load oscillating friction test. (C) 2012 Elsevier B. V. All rights reserved.