Continuous microreactor-assisted solution deposition is demonstrated for the deposition of CdS thin films on fluorine-doped tin oxide (FTO) coated glass. The continuous flow system consists of a microscale T-junction micromixer with the co-axial water circulation heat exchanger to control the reacting chemical flux and optimize the heterogeneous surface reaction. Dense, high quality nanocrystallite CdS thin films were deposited at an average rate of 25.2 nm/min, which is significantly higher than the reported growth rate from typical batch chemical bath deposition process. Focused-ion-beam was used for transmission electron microscopy specimen preparation to characterize the interfacial microstructure of CdS and FTO layers. The band gap was determined at 2.44 eV by UV-vis absorption spectroscopy. X-ray photon spectroscopy shows the binding energies of Cd 3d(3/2), Cd 3d(5/2), S 2P(3/2) and S 2P(1/2) at 411.7 eV, 404.8 eV, 162.1 eV and 163.4 eV, respectively. (C) 2012 Elsevier B.V. All rights reserved.