Tetrahedral amorphous diamond-like carbon (ta-DLC) films were deposited on magnetic recording heads using the filtered cathodic arc method. The deposited film thickness was on the order of several nanometers. The DLC films were then annealed to 100 degrees C-300 degrees C for 30 and 60 min, and the structure of the ta-DLC films was investigated using Raman spectroscopy, where the gross changes were observed in the Raman D and G peaks. Detailed interpretation concluded that there was sp(2) clustering as a function of temperature, and there was no sp(3)-to-sp(2) conversion after heating up to 300 degrees C. Furthermore, X-ray photoelectron spectroscopy suggested that oxidation of both the ta-DLC film and the adhesion layer occurs at 300 degrees C. Additionally, more film wear was observed with heating as measured by a nanoindenter. (C) 2013 Elsevier B. V. All rights reserved.