The results for laser induced breakdown spectroscopy (LIBS) measurements of CuIn1-xGaxSe2 (CIGS) thin film samples deposited on Mo-coated soda-lime glass by co-evaporation technique and those of bulk form CIGS targets are reported. The LIBS intensity calibration results for the thin film and bulk CIGS samples were compared with respect to the concentration ratios. While the concentrations for thin film CIGS samples were measured by X-ray fluorescence, the compositions of bulk samples were provided by the manufacturer. It was found that the calibration results of Ga/(Ga + In) ratio obtained from the thin film and bulk form samples showed a good agreement at optimized measurement conditions. It is demonstrated that bulk samples can provide reliable reference composition data for the elemental analysis of thin CIGS films. (C) 2013 Elsevier B.V. All rights reserved.