We produced a superhydrophobic surface by reactive ion etching and polytetrafluoroethylene coating of a silicon substrate. SF6/O-2 and a metal mesh were used for the etching, which produced pyramidal nanostructures on the substrate. The sputtering of the polytetrafluoroethylene thin film over the nanotextured substrate created a superhydrophobic surface with a water contact angle greater than 150 degrees, which was maintained for 7 weeks. The fluorinated polymer also exhibited hydrophobicity properties. (C) 2013 Elsevier B.V. All rights reserved.