This study offers empirical support for thin-film printing process and the use of the roll offset printing process for fine and smooth patterning through interface separation. The thin-film printing process consists of the following four processes: the coating process, off process, patterning process and set process. Of these, the coating process is crucial in determining the thickness and thickness uniformity of the final pattern. The off process brings the coated ink onto the roll blanket 100%; the patterning process plays a role in determining the shape of the final pattern; and the set process delivers the patterned shape on the roll onto the substrate. In experiments, the printing of line widths at approximately 1 mu m was demonstrated to be feasible. Additionally, the thickness of the printed patterns was found to be uniform and controllable, and smooth-surface printing of Ra 3.5 nm was achieved. (C) 2013 Elsevier B. V. All rights reserved.