In this study, a thorough investigation of parylene coatings was conducted, as follows: microstructure (i.e., X-ray diffractometer (XRD) and cold field emission scanning electron microscope (FESEM)), mechanical property (i.e., pencil hardness and cross-cut adhesion test), surface property (i.e., water contact angle measurement, IR, and Xray photoelectron spectroscopy (XPS)), and biocompatibility tests (i.e., fibroblast cell culture, platelet adhesion, and animal studies). The results revealed that parylene, a crystalline and brittle coating, exhibited satisfactory film adhesion and relative hydrophobicity, thereby contributing to its effective barrier properties. Fibroblast cell culturing on the parylene-deposited specimen demonstrated improved cell proliferation and equivalent to or superior blood compatibility than that of the medical-grade silicone (currently used clinically). In the animal study, parylene coatings exhibited similar subcutaneous inflammatory reactions compared with the medical-grade silicone. Both in vitro and in vivo tests demonstrated the satisfactory biocompatibility of parylene coatings. (C) 2013 Elsevier B. V. All rights reserved.