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Thin Solid Films, Vol.550, 742-746, 2014
Bending properties of organic-inorganic multilayer moisture barriers
In this study, the moisture-barrier performance was measured by an electrical calcium test before and after a repeated bending cycle of 10,000 times with various bending radii to investigate the bending properties of multilayer organic-inorganic barriers. We tested a single-layer barrier and three different multilayer-barrier structures. The measured change in barrier performance of the structures was correlated with calculated tensile strain. The calculation predicted the trend of the experimental data on the bending property, and the minimum bending radius seemed to be limited due to a sharp increase in the tensile strain at a bending radius less than 0.5 cm. (C) 2013 Elsevier B.V. All rights reserved.
Keywords:Moisture barrier;Bending property;Multilayer;Water vapor transmission rate;Atomic layer deposition;Aluminium oxide