Deoxidation behavior before and after deoxidation during preparation of low oxygen titanium powder was discussed. Transmission electron microscopy and secondary ion mass spectraoscopy studies revealed that the oxide layer was reduced to a thickness of 3 nm from 11 nm and the oxygen content within the powder was decreased from 2500 ppm to 920 ppm. The reduction of oxygen content resulted in the decrease of the lattice parameters and axial ratios. The surface oxide of deoxidized powder was quite stable in air showing no increase in the oxygen content after the exposure for one month. (C) 2013 Elsevier B.V. All rights reserved.