Recent progress on nanoscale molecular devices is reviewed. The advantages of organic molecules are highlighted in terms of their unique features such as quantum effects based on their nanometer size, optical properties originating from photochromism and chemical syntheses for various structural designs. This review covers three topics: a scanning probe microscope-based evaluation of individual molecules, nano-gap electrodes for electrical current through single-molecules and the incorporation of molecular functions into Si-based devices. In particular, the importance of the incorporation of organic molecules into Si-device architecture is emphasized with a view to realizing the large-scale integration of nanoscale molecular devices. (C) 2013 Elsevier B.V. All rights reserved.