For the sol-gel synthesis of Y-doped ZnO (YZO) thin films, the mole concentration of Y significantly affects the physical properties of YZO. Namely, the incorporation of Y dopants into ZnO helps improve the surface, structural, optical, and electrical properties of YZO. When the appropriate concentration of Y is doped in YZO (i.e., Y similar to 2 at.%), the densities of oxygen-related native point defects are minimized, and the crystallite sizes of YZO grains are maximized. Consequently, the YZO (Y: 2 at.%) films show the improved electrical properties with the lower Hall resistivity. (C) 2014 Elsevier B.V. All rights reserved.