양면동시증착 열선-CVD를 이용한 a-Si:H/c-Si 이종접합 태양전지 제조

정대영; 송준용; 김경민; 이희덕; 송진수; 이정철; Dae Young Jeong; Jun Yong Song; Kyung Min Kim; Hi-Deok Lee; Jinsoo Song; Jeong Chul Lee

Korean Journal of Materials Research, Vol.21, No.12, 666-672, December, 2011

DOI10.3740/MRSK.2011.21.12.666 Export Citation

양면동시증착 열선-CVD를 이용한 a-Si:H/c-Si 이종접합 태양전지 제조

Fabrication of a-Si:H/c-Si Hetero-Junction Solar Cells by Dual Hot Wire Chemical Vapor Deposition

정대영, 송준용, 김경민, 이희덕¹, 송진수, 이정철^†

한국에너지기술연구원 차세대전지원천기술센터
¹충남대학교 전자전파정보통신과

Dae Young Jeong, Jun Yong Song, Kyung Min Kim, Hi-Deok Lee¹, Jinsoo Song, and Jeong Chul Lee^†

KIER-UNIST Advanced Center for Energy, Korea Institute of Energy Research, Korea
¹Department of Electronic, Chungnam National University, Korea

E-mail:

The a-Si:H/c-Si hetero-junction (HJ) solar cells have a variety of advantages in efficiency and fabrication processes. It has already demonstrated about 23% in R&D scale and more than 20% in commercial production. In order to further reduce the fabrication cost of HJ solar cells, fabrication processes should be simplified more than conventional methods which accompany separate processes of front and rear sides of the cells. In this study, we propose a simultaneous deposition of intrinsic thin a-Si:H layers on both sides of a wafer by dual hot wire CVD (HWVCD). In this system, wafers are located between tantalum wires, and a-Si:H layers are simultaneously deposited on both sides of the wafer. By using this scheme, we can reduce the process steps and time and improve the efficiency of HJ solar cells by removing surface contamination of the wafers. We achieved about 16% efficiency in HJ solar cells incorporating intrinsic a-Si:H buffers by dual HWCVD and p/n layers by PECVD.

Keywords:solar cell;heterojunction;hot-Wire CVD;passivation;co-deposition

[References]

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[1] Tanaka M, Taguchi M, Matsuyama T, Sawada T, Tsuda S, Nakano S, Hanafusa H, Kuwano Y, Jpn. J. Appl. Phys., 31, 3518 (1992)

[2] Tanaka M, Okamoto S, Tsuge S, Kiyawa S, in Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion, 1, 955 (2003).

[3] Matsumoto Y, Hirata G, Takakura H, Okamoto H, Hamakawa Y, J. Appl. Phys., 67, 6538 (1990)

[4] Tsunomura Y, Yoshimine Y, Taguchi M, Baba T, Kinoshita T, Kanno H, Sakata H, Maruyama E, Tanaka M, Sol. Energy Mater. Sol. Cells, 93(6-7), 670 (2009)

[5] Dauwe S, Schmidt J, Hezel R, in Proceedings of the 29th IEEE Photovoltaic Specialists Conference (New Orleans, Louisiana, May, 2002), p.1246. DOI : 10.1109/ PVSC.2002.1190834.

[6] Angermann H, Henrion W, Roseler A, Rebien M, Mater. Sci. Eng. B-Solid State Mater. Adv. Technol., 73, 178 (2000)

[7] Angermann H, Rappich J, Korte L, Sieber I, Conrad E, Schmidt M, Hubener K, Polte J, Hauschild J, Appl. Surf. Sci., 254(12), 3615 (2008)

[8] Angermann H, Rappich J, Sieber I, Hubener K, Hauschild J, Anal. Biochem., 390, 1463 (2008)

[9] Angermann H, Korte L, Rappich J, Conrad E, Sieber I, Schmidt M, Hubener K, Hauschild J, Thin Solid Films, 516(20), 6775 (2008)

[10] van Cleef MWM, Rath JK, Rubinelli FA, van der Werf CHM, Schropp REI, van der Weg WF, J. Appl. Phys., 82, 6089 (1997)

[11] Taguchi M, Kawamoto K, Tsuge S, Baba T, Sakata H, Morizane M, Uchihashi K, Nakamura N, Kiyama S, Oota O, Progr. Photovolt. Res. Appl., 8(5), 503 (2000)

[12] Jensen N, Hausner RM, Bergmann RB, Werner JH, Rau U, Progr. Photovolt. Res. Appl., 10(1), 1 (2002)

[13] Beckers I, Nickel NH, Pilz W, Fuhs W, J. Non-Cryst. Solids, 227-230, 847 (1998)

[14] Kaneko T, Wakagi M, Onisawa K, Minemura T, Appl. Phys. Lett., 64(14), 1865 (1994)

[15] Meier J, Torres P, Platz R, Dubail S, Kroll U, Selvan JAA, Vaucher NP, Hof C, Fischer D, Keppner H, Shah A, Ufert KD, Giannoules P, Koehler J, Mater. Res. Soc. Symp. Proc., 420, 3 (1996)

[16] Finger F, Hapke P, Luysberg M, Carius R, Wagner H, Scheib M, Appl. Phys. Lett., 65(20), 2588 (1994)

[17] Hwang HL, Wang KC, Hsu KC, Yew TR, Loferski JJ, Progr. Photovolt. Res. Appl., 4, 165 (1996)

[18] Molenbroek EC, Mahan AH, Gallagher A, J. Appl. Phys., 82(4), 1909 (1997)

[19] Matsumura H, Jpn. J. Appl. Phys., 37(6A), 3175 (1998)

[20] Cifre J, Bertomeu J, Puigdollers J, Polo MC, Andreu J, Lloret A, Appl. Phys. Mater. Sci. Process., 59, 645 (1994)

[21] Wiesmann H, Ghosh AK, McMahon T, Strongin M, J. Appl. Phys., 50, 3752 (1979)

[22] Sinton RA, Cuevas A, Appl. Phys. Lett., 67(17), 2510 (1996)

[23] Kim YS, Drowly CI, Hu C, in Proceedings of the 14th IEEE Photovoltaic Specialist Conference (San Diego, CA, January 1980) p. 560.

[24] Martin I, Vetter M, Orpella A, Puigdollers J, Cuevas A, Alcubilla R, Appl. Phys. Lett., 79, 2199 (2001)