화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.21, No.12, 703-707, December, 2011
Effects of Sputter Parameters on Electrochromic Properties of Tungsten Oxide Thin Films Grown by RF Sputtering
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The electrochromic properties of tungsten oxide films grown by RF sputtering were investigated. Among the sputter parameters, first the Ar:O2 ratios were controlled with division into only an O2 environment, 1:1 and 4:1. The structure of each film prepared by these conditions was studied by X-ray diffraction, X-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy. The sputter-deposited tungsten oxide films had an amorphous structure regardless of the Ar:O2 ratios. The chemical compositions, however, were different from each other. The stoichiometric structure and low-density film was obtained at higher O2 contents. Electrochemical tests were performed by cyclic voltammetry and chronoamperometry at 0.05 M H2SO4 solutions. The current density and charge ratio was estimated during the continuous potential and pulse potential cycling at .0.5 V and 1.8 V, respectively. The film grown in a higher oxygen environment had a higher current density and a reversible charge reaction during intercalation and deintercalation. The in-situ transmittance tests were performed by He-Ne laser (633 nm). At higher oxygen contents, a big transmittance difference was observed but the response speed was too slow. This was likely caused by higher film resistivity. Furthermore, the effect of sputtering pressure was also investigated. The structure and surface morphology of each film was observed by X-ray diffraction and scanning electron microscopy. A rough surface was observed at higher sputtering pressure, and this affected the higher transmittance difference and coloration efficiency.
  1. Deb SK, Phil. Mag., 27, 801 (1973)
  2. Monk PMS, Mortimer RJ, Rosseinsky DR, Electrochromism: Fundamentals and Applications, p. 3, VCH, Weinheim (1995). (1995)
  3. Granqvist CG, Handbook of Inorganic Electrochromic Materials, p. 1, Elsevier, Amsterdam, (1995). (1995)
  4. Lee SH, Gao W, Tracy CE, Branz HM, Benson DK, Deb S, J. Electrochem. Soc., 145, 3545 (1998)
  5. Richardson TJ, Slack JL, Armitage RD, Kostecki R, Farangis B, Rubin MD, Appl. Phys. Lett., 78, 3047 (2001)
  6. Mortimer RJ, Dyer AL, Reynolds JR, Displays, 27, 2 (2006)
  7. Park KW, Shim HS, Seong TY, Sung YE, Appl. Phys. Lett., 88, 211107 (2006)
  8. Porqueras I, Viera G, Marti J, Bertran E, Thin Solid Films, 343-344, 179 (1999)
  9. Withan HS, Chindaudom P, Collins AIARW, Messier R, Vedam K, J. Vac. Sci. Tech. A, 11(4), 1881 (1993)
  10. Meulenkamp EA, J. Electrochem. Soc., 144(5), 1664 (1997)
  11. Arnoldussen TC, J. Electrochem. Soc., 128, 117 (1981)
  12. Moulder JF, Stickle WF, Sobol PE, Bomben KD, Handbook of X-ray Photoelectron Spectroscopy, p. 146-147 ed. J. Chastain and R. C. King, Jr., Physical Electronics, Minnesota, USA (1995). (1995)
  13. Nagai J, Kamimori T, Mizuhashi M, Proc. Soc. Photo Opt. Instrum. Eng., 562, 39 (1985)
  14. Falaras P, Hugot-Le Goff A, Joiret S, Large-area Chromogenics: Materials and Devices for Transmittance Control, p. 16, ed. Lampert C, Granqvist C, SPIE Opt. Bellingham (1990) (1990)
  15. He JL, Chiu MC, Surf. Coating. Tech., 127, 43 (2000)
  16. Lee SH, Cheong HM, Tracy CE, Mascarenhas A, Czanderna AW, Deb SK, Appl. Phys. Lett., 75, 1541 (1999)