유동층 화학증착법을 이용하여 증착한 열분해 탄소의 특성에 미치는 증착조건의 영향

박정남; 김원주; 박종훈; 조문성; 이채현; 박지연; Jeong-Nam Park; Weon-Ju Kim; Jong Hoon Park; Moon-Sung Cho; Chae Hyun Lee; Ji Yeon Park

Korean Journal of Materials Research, Vol.18, No.8, 406-410, August, 2008

DOI10.3740/MRSK.2008.18.8.406 Export Citation

유동층 화학증착법을 이용하여 증착한 열분해 탄소의 특성에 미치는 증착조건의 영향

Effect of Deposition Parameters on the Properties of Pyrolytic Carbon Deposited by Fluidized-Bed Chemical Vapor Deposition

박정남^{1, 2}, 김원주^{1, †}, 박종훈¹, 조문성³, 이채현², 박지연¹

¹한국원자력연구원 원자력재료연구부
²배재대학교 재료공학과
³한국원자력연구원 수소생산원자로기술개발부

Jeong-Nam Park^{1, 2}, Weon-Ju Kim^{1, †}, Jong Hoon Park¹, Moon-Sung Cho³, Chae Hyun Lee⁴, and Ji Yeon Park¹

¹Nuclear Material Research Division, Korea Atomic Energy Research Institute, Korea
²Department of Materials Engineering, Paichai University
³Nuclear Hydrogen Reactor Technology Development Division, Korea Atomic Energy Research Institute, Korea
⁴Department of Materials Engineering, Paichai University, Korea

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The properties of pyrolytic carbon (PyC) deposited from C2H2 and a mixture of C2H2/C3H6 on ZrO2 particles in a fluidized bed reactor were studied by adjusting the deposition temperature, reactant concentration, and the total gas flow rate. The effect of the deposition parameters on the properties of PyC was investigated by analyzing the microstructure and density change. The density could be varied from 1.0 g/cm3 to 2.2 g/cm3 by controlling the deposition parameters. The density decreased and the deposition rate increased as the deposition temperature and reactant concentration increased. The PyC density was largely dependent on the deposition rate irrespective of the type of the reactant gas used.

Keywords:fluidized-bed chemical vapor deposition;pyrolytic carbon;deposition parameter

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