AlOOH로부터 AlN분말의 합성

이재범; 김선태; Jaebum Lee; Seontai Kim

Korean Journal of Materials Research, Vol.16, No.12, 771-776, December, 2006

DOI10.3740/MRSK.2006.16.12.771 Export Citation

AlOOH로부터 AlN분말의 합성

Synthesis of AlN Powders from AlOOH

이재범, 김선태^†

한밭대학교 신소재공학부)

Jaebum Lee, and Seontai Kim^†

Department of Materials Science and Engineering, Hanbat National University, Daejeon, 305-719, Korea

E-mail:

In this study, we report a method to synthesize the aluminum nitride (AlN) powders from aluminum oxyhydroxide (AlOOH). AlOOH powders were prepared from the aluminum hydroxide () by heattreatment at the reaction temperature of . Simple heat treatment of AlOOH in the flow of gas leads to the formation of hexagonal AlN powders through intermediate conversion of and . The FTIR transmission spectra show a broad peak related to Al-N bonds centered around 690 confirming the presence of AlN. The major peaks in Raman spectra were observed in 250 and 659 . From the results, synthesized powders from the AlOOH powders were confirmed AlN powders.

Keywords:AlN;AlOOH;aluminum nitride;powder

[References]

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[2] Kaya K, Takahashi H, Shibata Y, Kanno Y, Hirai T, Jpn. J. Appl. Phys., 36, 2837 (1997)

[3] Ruffner JA, Clem PG, Tuttle BA, Dimos D, Gonzles DM, Thin Solid Fllms, 354, 256 (2000)

[4] Song ZR, Yu YH, Zou SC, Zheng ZH, Shen DS, Luo EZ, Xie Z, Sundaravel B, Wong SP, Wilson IH, Thin Solid Films, 459(1-2), 41 (2004)

[5] Sheppard LM, Ceram. Bull, 69, 1801 (1990)

[6] Baik Y, Drew RAL, Key Eng. Mater., 122, 553 (1996)

[7] Kameshima Y, Irie M, Yasumori A, Okada K, Solid State Ion., 172(1-4), 185 (2004)

[8] Kuang JC, Zhang CR, Zhou XG, Wang SQ, J. Cryst. Growth, 263(1-4), 12 (2004)

[9] Sakai T, Jwata M, Jpn, J. Ceram. Soc., 82, 181 (1974)

[10] Hirai S, Miwa T, Twata T, Ozawa M, Katayama HG, J. Jpn Inst. Metals, 53, 1035 (1989)

[11] Rosenband V, Gany A, J. Mater. Process. Technol., 147, 197 (2004)

[12] Lin CN, Chung SL, J. Mater, Res., 16, 2200 (2001)

[13] Klug HP, Alexander LE, X-ray Diffraction Procedures, New York, p.531 (1974) (1974)

[14] Chang A, Rhee SW, Baik S, J. Am. Ceram. Soc., 78, 33 (1995)

[15] Fan ZY, Newman N, Mater. Sci. Eng. B, 87, 244 (2001)

[16] Ambacher O, Brandt MS, Dimitrov R, Metzger T, Stutzmann M, Fischer RA, Miehr A, Bergmaier A, Dollinger G, J. Vac. Sci. Technol. B, 14(6), 3532 (1996)

[17] Collins AT, Lightowlers EC, Dean PJ, Phys. Rev., 158, 833 (1967)

[18] Zhang W, Someno Y, Sasaki M, Hirai T, Jpn. J. Appl, Phys., 32, L116 (1993)

[19] Hasegawa F, Takahashi T, Kubo K, Nannichi Y, Jpn. J. Appl. Phys., 26, 1555 (1987)

[20] Oh SM, Park DW, Thin Solid Films, 316(1-2), 189 (1998)

[21] Beamson G, Briggs D, Infrared Spectra of Inorganic Compouods, vol. 4, p.110, Academic Press Inc., London, 1997 (1997)

[22] Hays JM, Kuball M, Shi Y, Edgar JH, Jpn. J. Appl. Phys., 39, L710 (2000)

[23] Davydov VY, Kitaev YE, Goncharuk IN, Smirnov AN, Graul J, Semchinova O, Uffmann D, Smirnov MB, Mirogorodsky AP, Evarestov RA, Phys. Rev. B, 58, 12899 (1998)

[24] Filippids L, Siegle H, Hoffmann A, Thomsen C, Karch K, Bechstedt F, Phys. Stat, Sol. B, 198, 621 (1996)

[25] Haboeck HU, Hoffmann SA, Thomsen C, Phys. Stat. Sol. C, 6, 1710 (2003)

[26] Carlone C, Lakin KM, Shanks HR, J. Appl, Phys., 55, 4010 (1984)