rf 마그네트론 스파터법에 의해 제조된 태양전지용 ZnO:Al 박막의 전기 광학적 특성

전상원; 이정철; 박병옥; 송진수; 윤경훈; Sang Won Jeon; Jeong Chul Lee; Byung Ok Park; Jin Soo Song; Kyung Hoon Yoon

Korean Journal of Materials Research, Vol.16, No.1, 19-24, January, 2006

DOI10.3740/MRSK.2006.16.1.019 Export Citation

rf 마그네트론 스파터법에 의해 제조된 태양전지용 ZnO:Al 박막의 전기 광학적 특성

Electrical and Optical Characteristics of ZnO:Al Films Prepared by rf Magnetron Sputtering for Thin Film Solar Cells Application

전상원^{1, 2}, 이정철¹, 박병옥², 송진수³, 윤경훈^{3, †}

¹한국에너지기술연구원 태양전지연구센터
²경북대학교 무기재료공학과
³한국에너지기술연구원

Sang Won Jeon^{1, 2}, Jeong Chul Lee¹, Byung Ok Park³, Jin Soo Song¹, and Kyung Hoon Yoon^{1, †}

¹Sensors Cells Research Center, Korea Institute of Energy Research (KIER), Korea
²Dep. of Inorganic Materials Engineering, Kyungpook National University
³Dep. of Inorganic Materials Engineering, Kyungpook National University, Korea

E-mail:

ZnO:Al(AZO) films prepared by rf magnetron sputtering on glass substrate and textured by post-deposition chemical etching were applied as front contact and back reflectors for [Math Processing Error] -Si:H thin film solar cells. For the front transparent electrode contact, AZO films were prepared at various working pressures and substrate temperature and then were chemically etched in diluted HCl(1%). The front AZO films deposited at low working pressure(1 mTorr) and low temperature ( [Math Processing Error] ) exhibited uniform and high transmittance ( [Math Processing Error] 80%) and excellent electrical properties. The solar cells were optimized in terms of optical and electrical properties to demonstrate a high short-circuit current.

Keywords:textured AZO;[Math Processing Error]-Si:H;solar cell;thin film

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[1] Chopra KL, Major S, Pandya DK, Thin Solid Films, 102, 1 (1983)

[2] Lampert CM, Energy research, 7, 359 (1983)

[3] Manifacier JC, Szepessy L, Bresse JF, Perotin M, Stuck R, Mater. Res. Bull., 14, 109 (1979)

[4] Yamada A, Wenas WW, Yoshino M, Jpn. J. Appl. Phys., 30, L1152 (1991)

[5] Reddy KTR, Gopalaswamy H, Reddy PJ, Miles RW, J. Cryst. Growth, 210(4), 516 (2000)

[6] Ryu YR, Zhu S, Look DC, Wrobel JM, Jeong HM, White HW, J. Cryst. Growth, 216(1-4), 330 (2000)

[7] Chem M, Pei ZL, Sun C, Gong J, Hung RF, Wen LS, Mater. Sci. Eng., B, Solid state mater. Adv. Technol., 85, 212 (2001)

[8] Stambolova I, Konstantinov K, Vassilev S, Peshev P, Tsacheva T, Mater. Chem. Phys., 63(2), 104 (2000)

[9] Martimez MA, Herero J, Gutierez MT, Sol. Energy Mater. Sol. Cells, 45, 75 (1997)

[10] Song JS, Park IJ, Yoon KH, Cho WY, J. Korean Phys. Soc, 29, 219 (1996)

[11] Yoshino M, Wenas WW, Yamada A, Konagai M, Takahasi K, Jpn. J. Appl. Phys, 32, 726 (1993)

[12] Meng LJ, Dossantos MP, Thin Solid Films, 250(1-2), 26 (1994)

[13] Brodie DE, Singh R, Morgan J, Leslie JD, More CJ, Dixon EE, Proc. 12th IEEE Photovoltaic Specialists Conf., 1980, New York, p. 468 (1980)

[14] Kluth O, Rech B, Houben L, Wieder S, Schope G, Beneking C, Wagner H, Loffl A, Schock HW, Thin Solid Films, 351(1-2), 247 (1999)

[15] Muller J, Kluth O, Wieder S, Siekmann H, Schope G, Reetz W, Vetterl O, Lundszien D, Lambertz A, Finger F, Rech B, Wagner H, Sol. Energy Mater. Sol. Cells, 66(1-4), 275 (2001)

[16] Anna JA, Selven, Keppner K, Shan A, Mater. Res. Soc. Smp. Proc., 426, 497 (1997)

[17] Loffl A, Wieder S, Rech B, kluth O, Beneking C, Wagner H, Proc. 14th Eur. PV Sol. Energy Conf., 2089 (1997)

[18] Ellmer K, Cebulla R, Wendt R, Thin Solid Films, 317(1-2), 413 (1998)

[19] Kluth O, Schope G, Hupkes J, Agashe C, Muller J, Rech B, Thin Solid Films, 442(1-2), 80 (2003)

[20] Yu BS, Kim ES, Yoo SW, Lee JH, J. Kor. Ceram. Soc., 32, 799 (1996)

[21] Cullity B, 'Elements of X-ray Diffracion', Addison-Wesley, London, 99 (1959) (1959)

[22] Choi JH, Cho NH, Korean J. Cryst., 10(2), 136 (1999)