내마모 구조 코팅용 Cr-Al-Si-N 코팅막의 미세구조와 기계적 특성에 관한 연구

강동식; 김광호; Dong Shik Kang; Kwang Ho Kim

Korean Journal of Materials Research, Vol.15, No.11, 730-734, November, 2005

DOI10.3740/MRSK.2005.15.11.730 Export Citation

내마모 구조 코팅용 Cr-Al-Si-N 코팅막의 미세구조와 기계적 특성에 관한 연구

Microstructure and Mechanical Properties of Cr-Al-Si-N Coatings for Wear Resistant and Structural Applications

강동식, 김광호 ^†

부산대학교 재료공학부

Dong Shik Kang, and Kwang Ho Kim^†

Division of Materials Science and Engineering, Pusan National University, Busan, 609-735, Korea

E-mail:

Cr-Al-Si-N coatings were deposited on WC-Co substrates by a hybrid coating system of arc ion plating and DC magnet :on sputtering technique in [Math Processing Error] mixture. The Cr-tll-Si-N coatings were synthesized with different Si contents. Their microstructure and mechanical properties were systematically investigated. The average size of crystallites largely decreases with the increase of Si content compared with Cr-Al-N. The microhardness of Cr-Al-Si-N coatings largely increases from 24 to 55 GPa. The enhanced hardness is believed to originate from the microstructural change by the fine composite microstructure of Cr-Al-N coatings with Si addition. The average friction coefficient of Cr-Al-Si-N coatings decreases from 0.84 to 0.45 with increasing Si content up to [Math Processing Error] .

Keywords:Cr-Al-Si-N;micorstructure;mechanical properties

[References]

Rebholz C, Ziegele H, Leyland A, Mattew A, Surf. Coat. Technol., 115, 222 (1999)
Creus J, Indriss H, Mazille H, Sanchette F, Jacquot P, Surf. Coat. Technol., 107, 183 (1998)
Hones P, Sanjines R, Levy F, Thin Solid Films, 332(1-2), 240 (1998)
Lee KH, Park CH, Yoon YS, Lee JJ, Thin Solid Films, 385(1-2), 167 (2001)
Hones P, Diserens M, Sanjines R, Levy F, J. Vac. Sci. Technol. B, 18(6), 2851 (2000)
Vetter J, Lugscheider E, Guerreiro SS, Surf. Coat. Technol., 98, 1231 (1998)
Kawate M, Hashimoto AK, Suzuki T, Surf. Coat. Technol., 165, 163 (2003)
Banakh O, Schmud PE, Sanjines R, Levy F, Surf. Coat. Technol., 163, 57 (2003)
Vaz F, Rebouta L, Goudeau P, Pacaud J, Garem H, Riviere JP, Cavaleiro A, Alves E, Surf. Coat. Technol., 133, 307 (2000)
Park ON, Hyun Park J, Yoon SY, Lee MH, Kim KH, Surf. Coat. Technol., 179, 83 (2004)
Choi SR, Park IW, Kim SH, Kim KH, Thin Solid Films, 447, 371 (2004)
Diserens M, Patscheider J, Levy F, Surf. Coat. Technol., 108, 241 (1998)
Moulder JF, Stickle WF, Sobol PE, Bomben KD, Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics, Inc, Minesota, pp. 238 (1995) (1995)
Lasalmonie A, Strudel JL, J. Mater. Sci., 21, 1837 (1986)
Veprek S, Reiprich S, Thin Solid Films, 268(1-2), 64 (1995)
Kim KH, Choi SR, Yoon SY, Surf. Coat. Technol., 298, 243 (2002)
Takadoum J, Houmid-Bennani H, Mairey D, J. Eur. Ceram. Soc., 18, 553 (1998)

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[1] Rebholz C, Ziegele H, Leyland A, Mattew A, Surf. Coat. Technol., 115, 222 (1999)

[2] Creus J, Indriss H, Mazille H, Sanchette F, Jacquot P, Surf. Coat. Technol., 107, 183 (1998)

[3] Hones P, Sanjines R, Levy F, Thin Solid Films, 332(1-2), 240 (1998)

[4] Lee KH, Park CH, Yoon YS, Lee JJ, Thin Solid Films, 385(1-2), 167 (2001)

[5] Hones P, Diserens M, Sanjines R, Levy F, J. Vac. Sci. Technol. B, 18(6), 2851 (2000)

[6] Vetter J, Lugscheider E, Guerreiro SS, Surf. Coat. Technol., 98, 1231 (1998)

[7] Kawate M, Hashimoto AK, Suzuki T, Surf. Coat. Technol., 165, 163 (2003)

[8] Banakh O, Schmud PE, Sanjines R, Levy F, Surf. Coat. Technol., 163, 57 (2003)

[9] Vaz F, Rebouta L, Goudeau P, Pacaud J, Garem H, Riviere JP, Cavaleiro A, Alves E, Surf. Coat. Technol., 133, 307 (2000)

[10] Park ON, Hyun Park J, Yoon SY, Lee MH, Kim KH, Surf. Coat. Technol., 179, 83 (2004)

[11] Choi SR, Park IW, Kim SH, Kim KH, Thin Solid Films, 447, 371 (2004)

[12] Diserens M, Patscheider J, Levy F, Surf. Coat. Technol., 108, 241 (1998)

[13] Moulder JF, Stickle WF, Sobol PE, Bomben KD, Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics, Inc, Minesota, pp. 238 (1995) (1995)

[14] Lasalmonie A, Strudel JL, J. Mater. Sci., 21, 1837 (1986)

[15] Veprek S, Reiprich S, Thin Solid Films, 268(1-2), 64 (1995)

[16] Kim KH, Choi SR, Yoon SY, Surf. Coat. Technol., 298, 243 (2002)

[17] Takadoum J, Houmid-Bennani H, Mairey D, J. Eur. Ceram. Soc., 18, 553 (1998)