이온플레이팅법으로 제조된 TiAlLaN계 박막의 산화속도

서성만; 이기선; 이기안; Sung Man Seo; Kee-Ahn Lee; Kee-Ahn Lee

Korean Journal of Materials Research, Vol.14, No.3, 163-167, March, 2004

DOI10.3740/MRSK.2004.14.3.163 Export Citation

이온플레이팅법으로 제조된 TiAlLaN계 박막의 산화속도

Oxidation Rates of TiAlLaN Thin Films Deposited by Ion Plating

서성만, 이기선 ^†, 이기안¹

공주대학교 신소재공학부
¹포항산업과학연구원 부품신소재연구센터 신금속연구팀

Sung Man Seo, Kee-Ahn Lee^†, and Kee-Ahn Lee¹

Division of Advanced Materials Engineering, Kongju National University, Korea
¹Research Institute of Industrial Science & Technology(RIST), Korea

E-mail:

TiAl(La)N thin films were oxidized in vacuum of about 7 Pa to reduce the oxidation of WC-Co as a substrate. The oxidation rate constants of the thin films were quantified by an assumption of parabolic oxidation. Increasing AI content significantly decreased the parabolic oxidation rate constant. A simultaneous addition of AI and La was more effective to reduce the oxidation rate. The parabolic oxidation rate constant of Ti 0.66 Al 0.32 La 0.02 N thin film at 1273 K showed about ten times lower than that of TiN. The addition of a small amount of La with Al induced the preferential formation of dense α ?Al 2 O 3 film in oxide film, leading to the abrupt reduction of oxidation rate.

Keywords:TiAlN;oxidation;oxide film;oxidation rate;Lanthanum

[References]

Sundgren JE, Thin Solid Films, 128, 21 (1985)
Milosev, Sterehblow HH, Navinsek B, Metikos-Hukovic M, Surf. and Interface Analysis, 23, 529 (1995)
Munz WD, J. Vac. Sci. Tech. A, 4(6), 2721 (1986)
Knotek O, Bosch W, Leyendecker T, 11th Int. Plansee Seminar, 1, 667 (1985)
Bienk EJ, Reitz H, Mikkelsen NJ, Surf. Coat. Tech., 76-77, 475 (1995)
Wang DY, Li YW, Ho WY, Surf. Coat. Tech., 114(2), 109 (1999)
Habig KH, Meier G, Kocker Z, Surf. Coat. Tech., 62, 438 (1993)
Konig W, Fritsch R, Kammermeier D, Surf. Coat. Tech, 49, 316 (1991)
Hofmann D, Hensel B, Yasuoka M, Kato N, Surf. Coat. Tech., 61, 326 (1993)
Leyendecker T, Lemmer O, Esser S, Ebberink J, Surf. Coat. Tech., 48, 175 (1991)
Lee KS, Shin YC, Oh KH, Park WW, Ra HY, J. Kor. Inst. Met. Mater., 34(7), 943 (1996)
Penttinen I, Molarius JM, Lappalainen R, J. Vac. Sci. Tech. A, 6(3), 2158 (1988)
Shaw MC, Metal Cutting Principles, pp. 255, Oxford Univ. Press, (1997) (1997)

[Referenced By]

[Related Articles]

[1] Sundgren JE, Thin Solid Films, 128, 21 (1985)

[2] Milosev, Sterehblow HH, Navinsek B, Metikos-Hukovic M, Surf. and Interface Analysis, 23, 529 (1995)

[3] Munz WD, J. Vac. Sci. Tech. A, 4(6), 2721 (1986)

[4] Knotek O, Bosch W, Leyendecker T, 11th Int. Plansee Seminar, 1, 667 (1985)

[5] Bienk EJ, Reitz H, Mikkelsen NJ, Surf. Coat. Tech., 76-77, 475 (1995)

[6] Wang DY, Li YW, Ho WY, Surf. Coat. Tech., 114(2), 109 (1999)

[7] Habig KH, Meier G, Kocker Z, Surf. Coat. Tech., 62, 438 (1993)

[8] Konig W, Fritsch R, Kammermeier D, Surf. Coat. Tech, 49, 316 (1991)

[9] Hofmann D, Hensel B, Yasuoka M, Kato N, Surf. Coat. Tech., 61, 326 (1993)

[10] Leyendecker T, Lemmer O, Esser S, Ebberink J, Surf. Coat. Tech., 48, 175 (1991)

[11] Lee KS, Shin YC, Oh KH, Park WW, Ra HY, J. Kor. Inst. Met. Mater., 34(7), 943 (1996)

[12] Penttinen I, Molarius JM, Lappalainen R, J. Vac. Sci. Tech. A, 6(3), 2158 (1988)

[13] Shaw MC, Metal Cutting Principles, pp. 255, Oxford Univ. Press, (1997) (1997)