화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Korean Journal of Materials Research, Vol.14, No.3, 186-190, March, 2004
DOI10.3740/MRSK.2004.14.3.186  Export Citation
초소형 전자칼럼의 제작 및 특성 연구
Fabrication Method of the Electron Beam Microcolumn and Its Performance Evaluation
안승준†, 김대욱, 김영철, 안성준1, 김영정2, 김호섭
  • 선문대학교 자연과학부 신소재과학과/차세대반도체기술연구소
  • 1선문대학교 전자정보통신공학부
  • 2선문대학교 공과대학 재료공학부
S. Ahn†, D.W. Kim, Y.C. Kim, S.J. Ahn1, Y.J. Kim2, and H.S. Kim
  • Department of Physics and Advanced Material Science, Sun Moon University, Korea
  • 1Division of Electronics, I&C Engineering, Sun Moon University, Korea
  • 2Division of Materials Engineering, Sun Moon University, Korea
E-mail:
An electron beam microcolumn composed of an electron emitter, micro lenses, scan deflector, and focus lenses have been fabricated and tested in the STEM mode. In this paper, we report a technique of precisely aligning the electron lenses by the laser diffraction patterns instead of the conventional alignment method based on aligner and STM. STEM images of a standard Cu-grid were observed using a fabricated microcolumn under both the retarding and accelerating modes.
Keywords:electron beam microcolumn;laser diffraction pattern;electron optics;laser alignment;electron beam lithography
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