왕복패들이 패턴화된 음극의 전착균일성에 미치는 영향

오영주; 정순효; Young-joo Oh; Soon-hyo Chung

Korean Journal of Materials Research, Vol.14, No.3, 196-202, March, 2004

DOI10.3740/MRSK.2004.14.3.196 Export Citation

왕복패들이 패턴화된 음극의 전착균일성에 미치는 영향

Effect of a Reciprocating Paddle on the Electrodeposit Uniformity of Patterned Cathodes

오영주^†, 정순효

한국과학기술연구원 금속공정연구센터

Young-joo Oh^†, and Soon-hyo Chung

Metal Processing Research Center, Korea Institute of Science and Technology, P.O.Box 131, Cheongryang, Seoul 130-650, Korea

E-mail:

A numerical simulation based on the finite element method is used to investigate the effect of a reciprocal paddle on the uniformity of deposition rates at a patterned electrode. The calculated deposition rates agreed well with the measured values. The influences of the paddle velocity, the gap between cathodes and paddles, anode size and the distance between the anode and cathode have been studied. The optimum conditions on the paddle and geometric factors for electrodeposit uniformity could be obtained.

Keywords:Finite element method;Electrodeposition;Uniformity of current distribution;Reciprocal paddle

[References]

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[1] Shinobu W, Plasma display business frontier, p. 148, Kogyo Chosakai Publishing Co., Ltd, Tokyo (1997) (1997)

[2] Yoshihiro I, Kenji K, Plasma parts and materials frontier, p. 212, Kogyo Chosakai Publishing Co., Ltd, Tokyo (2002) (2002)

[3] Cho SJ, Ryu BG, Park MH, SID 02 Digest, (2002) 1072 (2002)

[4] Powers JV, Romankiw LT, U.S.Pat.3.652,422 (1972) (1972)

[5] Mehdizadeh S, Dukovic JO, Andricacos PC, Romankiw LT, Cheh HY, J. Electrochem. Soc., 137, 110 (1990)

[6] Mehdizadeh S, Dukovic JO, Andricacos PC, Romankiw LT, Cheh HY, ibid., 139, 78 (1992)

[7] Mehdizadeh S, Dukovic J, Andricacos PC, Romankiw LT, Cheh HY, J. Electrochem. Soc., 140(12), 3497 (1993)

[8] Newman J, Electrochemical Systems, 1st ed., p.386, Prentice Hall, Inc., Englewood Cliffs, NJ (1973) (1973)

[9] Bard AJ, Faulkner LR, Electrochemical Methods, 1st ed., p.29, John Wiley & Sons, Inc., New York (1980) (1980)

[10] Rice DE, Sundstrom D, McEachern MF, Klumb LA, Talbot JB, J. Electrochem. Soc., 135, 2777 (1988)

[11] Newman J, Electrochemical Systems, 1st ed., p.177, Prentice Hall, Inc., Englewood Cliffs, NJ (1973) (1973)