나노인덴테이션과 주사탐침현미경을 이용한 박막 재료의 특성평가

김봉섭; 윤존도; 김종국; Bongseob Kim; Jondo Yun; Jongkuk Kim

Korean Journal of Materials Research, Vol.13, No.9, 606-612, September, 2003

DOI10.3740/MRSK.2003.13.9.606 Export Citation

나노인덴테이션과 주사탐침현미경을 이용한 박막 재료의 특성평가

Characterization of Thin Film Materials by Nanoindentation and Scanning Probe Microscopy

김봉섭, 윤존도 ^{1, †}, 김종국²

경남대학교 공동기기센터
¹경남대학교 신소재공학부
²한국기계연구원 박막공정그룹

Bongseob Kim, Jondo Yun^{1, †}, and Jongkuk Kim²

The Center for Instrumental Analysis, Kyungnam University, Masan 631-701, Korea
¹Division of Advanced Materials Engineering, Kyungnam University, Korea
²Thin Film Processing Group, Korea Institute of Machinery & Mateirals, Changwon, 641-010, Korea

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Surface and mechanical properties of thin films with submicron thickness was characterized by nanoindentation with Berkovich and Vickers tips, and scanning probe microscopy. Nanoindention was made in a depth range of 15 to 200 nm from the surface by applying tiny force in a range from 150 to N. Stiffness, contact area, hardness, and elastic modulus were determined from the force-displacement curve obtained. Reliability was first tested by using fused quartz, a standard sample. Elastic modulus and hardness values of fused quartz measured were the same as those reported in the literature within two percent of error. Mechanical properties of ITO thin film were characterized in a depth range of 15∼200nm. As indentation depth increased, elastic modulus and hardness decreased by substrate effect. Ion beam deposited DLC thin films were indented in a depth range of 40∼50 nm. The results showed that the DLC thin film using benzene and bias voltage 0∼-50 V has elastic modulus and hardness value of 132 and 18 GPa respectively. Pure DLC thin films showed roughnesses lower than 0.25 nm, but silicon-added DLC thin films showed much higher roughness values, and the wavy surface morphology.

Keywords:nanoindentation;scanning probe microscopy;hardness;elastic modulus;thin film

[References]

Scanning Probe Microscopy and Spectroscopy, Ed. by Bonnell DA, Wiley-VCH, USA (2001) (2001)
Advances in Scanning Probe Microscopy, Ed. by Sakurai T, Watanabe Y, Springer-Verlag, Berlin, Germany (2000) (2000)
Bai C, Scanning Tunneling Microscopy and its Applications, 2nd ed., Springer-Verlag, Berlin, Germany (2000) (2000)
Yun J, Kor. J. Ceramist, 5(2), 8 (2002)
Fischer-Cripps AC, Nanoindentation, Springer-Verlag, New York, USA (2002) (2002)
Hahn JH, Kor. J. Ceram. Soc., 37(6), 596 (2000)
ASM Handbook, 8, ASM International, 232 (2000) (2000)
Oliver WC, Pharr GM, J. Mater. Res., 7(6), 1564 (1992)
Sneddon IN, Int. J. Eng. Sci., 4, 47 (1965)
Pharr GM, Oliver WC, Brotzen FR, J. Mater. Res., 7(3), 613 (1992)
Page TF, Pharr GM, Hay JC, Oliver WC, Lucas BN, Herbert E, Riester L, Mater. Res. Soc. Symp. Proc., 522, 53 (1998)
Riester L, Bridge RJ, Breder K, Mat. Res. Soc. Symp. Proc., 522, 45 (1998)

[Referenced By]

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[1] Scanning Probe Microscopy and Spectroscopy, Ed. by Bonnell DA, Wiley-VCH, USA (2001) (2001)

[2] Advances in Scanning Probe Microscopy, Ed. by Sakurai T, Watanabe Y, Springer-Verlag, Berlin, Germany (2000) (2000)

[3] Bai C, Scanning Tunneling Microscopy and its Applications, 2nd ed., Springer-Verlag, Berlin, Germany (2000) (2000)

[4] Yun J, Kor. J. Ceramist, 5(2), 8 (2002)

[5] Fischer-Cripps AC, Nanoindentation, Springer-Verlag, New York, USA (2002) (2002)

[6] Hahn JH, Kor. J. Ceram. Soc., 37(6), 596 (2000)

[7] ASM Handbook, 8, ASM International, 232 (2000) (2000)

[8] Oliver WC, Pharr GM, J. Mater. Res., 7(6), 1564 (1992)

[9] Sneddon IN, Int. J. Eng. Sci., 4, 47 (1965)

[10] Pharr GM, Oliver WC, Brotzen FR, J. Mater. Res., 7(3), 613 (1992)

[11] Page TF, Pharr GM, Hay JC, Oliver WC, Lucas BN, Herbert E, Riester L, Mater. Res. Soc. Symp. Proc., 522, 53 (1998)

[12] Riester L, Bridge RJ, Breder K, Mat. Res. Soc. Symp. Proc., 522, 45 (1998)