Korean Journal of Materials Research, Vol.12, No.9, 740-746, September, 2002
O 2 / Ar 플라즈마 처리에 의해 개질된 폴리카보네이트 기판에서 Cu의 밀착성
Adhesion of Cu on Polycarbonate Modified by O 2 / Ar Plasma Treatment
E-mail:
In this study, the polycarbonate surface was treated by O 2 / Ar gases plasma for the enhancement of adhesion with Cu electrode. From the point of view of hydrophilicity and the functionality, the micro-roughness, new functional groups and oxygen content of the polycarbonate surface were increased by the O 2 / Ar gases plasma treatment. The Cu films deposited on the as-received polycarbonate were easily detached while, after the O 2 / Ar gases plasma treatment the adhesive Cu films on polycarbonate could be obtained. These results can be explained that the polycarbonate had a hydrophilic surface with uniform micro-roughness and new functional groups by O 2 / Ar gases plasma treatment. Therefore, O 2 / Ar gases plasma treatment is a promising method for improvement of adhesion between polycarbonate and Cu electrode.
- Droulas JL, Jugnet Y, Due TM, Metallized plastics 3 edited by Mittal KL, Susko JR, Plenum press, New York, pp. 303-318 (1989) (1989)
- Yasuda H, 'Plasma Polymerization', Academic Press, Orlando, Fl (1985) (1985)
- Kang ET, Tan KL, Kato K, Uyama Y, Ikada Y, Macromolecules, 29(21), 6872 (1996)
- Nihlstrand A, Hjertberg T, Johansson K, Polymer, 38(14), 3581 (1997)
- Chen JR, Wakida T, J. Appl. Polym. Sci., 63(13), 1733 (1997)
- Good RJ, J. Adhesion Sci. Technol., 6(12), 1269 (1992)
- Koh SK, Song SK, Choi WK, Jung HJ, Han SN, J. Mater. Res., 10, 2390 (1995)
- Cho JS, Choi WK, Yoon KH, Jung HJ, Koh SK, Mat. Res. Soc. Symp, 396, 341 (1996)
- Choi WK, Koh SK, Jung HJ, J. Vac. Sci. Technol. A, 14(4), 2366 (1996)
- Keil M, Rastomjee CS, Rajag opal A, Sotobayashi H, Bradshaw AM, Lamont CLA, Gador D, Buchberger C, Fink R, Umbach E, Appl, Sruf. Sci., 125, 273 (1998)
- Charbonnier M, Alami M, Romand M, GirardeauMontaut JP, Afif M, Appl. Sur. Sci., 109/110, 206 (1997)
- Patnaik A, Li C, Appl. Surf. Sci, 140, 197 (1999)
- Olowolafe JO, Li J, Mayer JW, J. Appl. Phys., 68(12), 6207 (1990)
- Inagaki N, Tasaka S, Kawai H, Yamada Y, J. Appl. Polym. Sci., 64(5), 831 (1997)
- Inagaki N, Tasaka S, Kawai H, J. Appl. Polym. Sci., Polymer, Chem. Ed., 33, 201 (1995)
- Beamson G, Briggs D, High Resolution XPS of Organic Polymer, Wiley, New York, pp.180 (1992) (1992)
- Lee YS, Whang CN, J. Korea Vacuum Society, 6, 187 (1997)