화학공학소재연구정보센터
Korean Journal of Materials Research, Vol.12, No.9, 740-746, September, 2002
O 2 / Ar 플라즈마 처리에 의해 개질된 폴리카보네이트 기판에서 Cu의 밀착성
Adhesion of Cu on Polycarbonate Modified by O 2 / Ar Plasma Treatment
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In this study, the polycarbonate surface was treated by O 2 / Ar gases plasma for the enhancement of adhesion with Cu electrode. From the point of view of hydrophilicity and the functionality, the micro-roughness, new functional groups and oxygen content of the polycarbonate surface were increased by the O 2 / Ar gases plasma treatment. The Cu films deposited on the as-received polycarbonate were easily detached while, after the O 2 / Ar gases plasma treatment the adhesive Cu films on polycarbonate could be obtained. These results can be explained that the polycarbonate had a hydrophilic surface with uniform micro-roughness and new functional groups by O 2 / Ar gases plasma treatment. Therefore, O 2 / Ar gases plasma treatment is a promising method for improvement of adhesion between polycarbonate and Cu electrode.
  1. Droulas JL, Jugnet Y, Due TM, Metallized plastics 3 edited by Mittal KL, Susko JR, Plenum press, New York, pp. 303-318 (1989) (1989)
  2. Yasuda H, 'Plasma Polymerization', Academic Press, Orlando, Fl (1985) (1985)
  3. Kang ET, Tan KL, Kato K, Uyama Y, Ikada Y, Macromolecules, 29(21), 6872 (1996)
  4. Nihlstrand A, Hjertberg T, Johansson K, Polymer, 38(14), 3581 (1997)
  5. Chen JR, Wakida T, J. Appl. Polym. Sci., 63(13), 1733 (1997)
  6. Good RJ, J. Adhesion Sci. Technol., 6(12), 1269 (1992)
  7. Koh SK, Song SK, Choi WK, Jung HJ, Han SN, J. Mater. Res., 10, 2390 (1995)
  8. Cho JS, Choi WK, Yoon KH, Jung HJ, Koh SK, Mat. Res. Soc. Symp, 396, 341 (1996)
  9. Choi WK, Koh SK, Jung HJ, J. Vac. Sci. Technol. A, 14(4), 2366 (1996)
  10. Keil M, Rastomjee CS, Rajag opal A, Sotobayashi H, Bradshaw AM, Lamont CLA, Gador D, Buchberger C, Fink R, Umbach E, Appl, Sruf. Sci., 125, 273 (1998)
  11. Charbonnier M, Alami M, Romand M, GirardeauMontaut JP, Afif M, Appl. Sur. Sci., 109/110, 206 (1997)
  12. Patnaik A, Li C, Appl. Surf. Sci, 140, 197 (1999)
  13. Olowolafe JO, Li J, Mayer JW, J. Appl. Phys., 68(12), 6207 (1990)
  14. Inagaki N, Tasaka S, Kawai H, Yamada Y, J. Appl. Polym. Sci., 64(5), 831 (1997)
  15. Inagaki N, Tasaka S, Kawai H, J. Appl. Polym. Sci., Polymer, Chem. Ed., 33, 201 (1995)
  16. Beamson G, Briggs D, High Resolution XPS of Organic Polymer, Wiley, New York, pp.180 (1992) (1992)
  17. Lee YS, Whang CN, J. Korea Vacuum Society, 6, 187 (1997)