알루미늄 양극산화 피막의 상전이에 미치는 수화처리의 영향

주은균; 김성수; 오한준; 조수행; 지충수; E.K. Joo; S.S. Kim; H.J. Oh; S.H. Cho; C.S. Chi

Korean Journal of Materials Research, Vol.12, No.7, 540-544, July, 2002

DOI10.3740/MRSK.2002.12.7.540 Export Citation

알루미늄 양극산화 피막의 상전이에 미치는 수화처리의 영향

Effects of Hydration Treatments on the Phase Transition of Anodic Aluminum Oxide Layers

주은균, 김성수¹, 오한준 ², 조수행, 지충수 ^†

국민대학교 신소재공학부
¹삼영전자공업(주)
²한서대학교 재료공학과

E.K. Joo, S.S. Kim¹, H.J. Oh², S.H. Cho, and C.S. Chi^†

School of Advanced Materials Engineering, Kookmin University, Seoul 136-702, Korea
¹Samyoung Electronics Co. Ltd., Sungnam, 462-120, Korea
²Dept. of Materials Engiheering, Hanseo University, Seosan, 352-820, Korea

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Hydration treatments were performed on the pure aluminum substrate at 100 ? C followed by anodizing and heat treatments on the layers. The transformation behaviors of the oxide layers according to the hydration treatment were studied using TEM, XRD, RBS etc. Above 90 ? C the hydrous oxide film could be formed, which were turned out to be hydrous oxides(AlOOH nH 2 O). The anodization on the hydrous oxide film was more effective for the transition of amorphous anodic oxides to the crystalline Υ?Al 2 O 3 comparing with the case for anodizing on the aluminum substrate without hydration treatment And additional heat treatments were also helpful for the acceleration of the transformation of the hydrous oxide to Υ?Al 2 O 3 . During the heat treatment the interface between Υ?Al 2 O 3 and the hydrous oxide layers migrated to the outer side of hydrous layer.

Keywords:hydrous oxide;dielectric film;ultramicrotomy;phase transformation

[References]

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Witt RS, J. Electrochem. Soc., 134, 1981 (1987)
Witt RS, J. Electrochem. Soc., 114, 843 (1987)
Dyer CK, Alwitt RS, J. Electrochem. Soc., 128, 300 (1981)
Flis J, Kowalczyk L, J. Appl. Electrochem., 25(5), 501 (1995)
Ashitaka Z, Thompson GE, Skeldon P, Wood GC, Shimizu K, J. Electrochem. Soc., 146(4), 1380 (1999)
Shimizu K, Kobayashi K, Thompson GE, Wood GC, J. Mater. Sci. Lett, 11, 281 (1992)
Chiu RL, Chang PH, Tung CH, Thin Solid Films, 260(1), 47 (1995)
Uchi H, Kanno T, Alwitt RS, J. Electrochem. Soc., 148(1), B17 (2001)
Arai K, Suzuki T, Atusumi T, J. Electrochem. Soc., 132, 1667 (1985)
Li Y, Shimada H, Sakairi M, Shigyo K, Takahashi H, Seo M, J. Electrochem. Soc., 144(3), 866 (1997)
Habazaki H, Skeldon P, Thompson GE, Wood GC, Philos. Mag, 73, 297 (1996)
Kim SK, Kim SS, Oh HJ, Cho ND, Chi CS, Korean J. Mater. Res., 11(4), 329 (2001)
Alwitt RS, Breen AJ, Leach JSL, Oxide-Elec trolyte Interfaces, Editor, Alwitt RS, The Electrochemical Proceedings Series, Princeton, NJ, 265 (1973) (1973)

[Related Articles]

[1] Tajima S, Advances in Corrosion Science and Technology, vol 1, Plenum Press, New York, 229 (1980) (1980)

[2] Witt RS, J. Electrochem. Soc., 134, 1981 (1987)

[3] Witt RS, J. Electrochem. Soc., 114, 843 (1987)

[4] Dyer CK, Alwitt RS, J. Electrochem. Soc., 128, 300 (1981)

[5] Flis J, Kowalczyk L, J. Appl. Electrochem., 25(5), 501 (1995)

[6] Ashitaka Z, Thompson GE, Skeldon P, Wood GC, Shimizu K, J. Electrochem. Soc., 146(4), 1380 (1999)

[7] Shimizu K, Kobayashi K, Thompson GE, Wood GC, J. Mater. Sci. Lett, 11, 281 (1992)

[8] Chiu RL, Chang PH, Tung CH, Thin Solid Films, 260(1), 47 (1995)

[9] Uchi H, Kanno T, Alwitt RS, J. Electrochem. Soc., 148(1), B17 (2001)

[10] Arai K, Suzuki T, Atusumi T, J. Electrochem. Soc., 132, 1667 (1985)

[11] Li Y, Shimada H, Sakairi M, Shigyo K, Takahashi H, Seo M, J. Electrochem. Soc., 144(3), 866 (1997)

[12] Habazaki H, Skeldon P, Thompson GE, Wood GC, Philos. Mag, 73, 297 (1996)

[13] Kim SK, Kim SS, Oh HJ, Cho ND, Chi CS, Korean J. Mater. Res., 11(4), 329 (2001)

[14] Alwitt RS, Breen AJ, Leach JSL, Oxide-Elec trolyte Interfaces, Editor, Alwitt RS, The Electrochemical Proceedings Series, Princeton, NJ, 265 (1973) (1973)