Plasma nitrocarburizing treatment was performed for SCM 435 steel by using a plasma ion nitriding system. The effects of the variation of nitrogen and methan contents upon the hardened layer was investigated. Both the thickness of the compound layer and the amount of ε phase in the compound layer increased with increasing nitrogen content. However, the thickness of the compound layer decreased due to unstable plasma for an atmosphere containing 90% N 2 gas content in the gas mixture. The amount of ε phase in the compound layer increased with increasing CH 4 gas content. For CH 4 gas content more than 2% in the gas mixture, the thickness of the compound layer decreased due to the formation of θ phase.