Applied Surface Science, Vol.312, 208-211, 2014
Patterning of Ti-based superconducting films using new etching solution
Tl-based cuprate superconducting films were prepared in a two-step process by RF magnetron sputtering of an amorphous precursor and ex situ thallination in open system. The films prepared on LaAlO3 and CeO2 buffered R-plane sapphire substrates consisted from c-axis oriented T1-2212 superconducting phase. The zero resistance critical temperature To exhibited values up to 94K. Subsequently, superconducting structures were prepared from the Tl-based thin films using photolithography process and wet etching. A new etchant based on potassium iodide was used for the Tl-based film patterning. The prepared structures had sharp edges, unchanged phase composition and critical temperature values. Such a way of the Tlbased film patterning is very simple, fast and easy to realize. (C) 2014 Elsevier B.V. All rights reserved.
Keywords:TI-based superconductors;Thin films;CeO2 buffered R-plane sapphire;LaAlO3;Structures;Wet etching