In this paper we describe a process of MoC superconducting thin films preparation by reactive magnetron sputtering in argon-acetylene atmosphere. The deposition process was optimized to achieve very smooth superconducting thin films with high sheet resistance. We present the results of four-point resistance measurements in cryostat cooled down to 300 mK. The roughness was measured by the atomic force microscope (AFM). The results are so far promising and enable us to pattern superconducting coplanar waveguide resonator with embedded nanostructures. (C) 2014 Elsevier B.V. All rights reserved.