TiAlSiN coatings with different Si and Al content are synthesized by multi-plasma immersion ion implantation and deposition (MPIIID). The microstructure, oxidation resistance and wear resistance of as-deposited coatings are characterized by x-ray diffraction (XRD), scanning electron microscopy (SEM), x-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), nano-indentation, thermo gravimetric analysis (TGA) and friction tests. Studies show that TiAlSiN coating has nc-TiAIN/a-Si3N4 structure. The grain size of nc-TiAIN decreases gradually and the volume fraction of the interfacial a-Si3N4 increases with the increased Si level. The obvious reduction in grain size together with the increase in interfacial a-Si3N4 eventually leads to the superior oxidation resistance of TiAlSiN coating. In addition, TiAlSiN coating with low Si and Al content exhibits poor oxidation stability and thermal stability, which results in its unsatisfied wear resistance at 800 degrees C. However, TiAlSiN coating with higher Si and Al content possesses better oxidation stability and thermal stability, and this coating shows excellent wear resistance both at RI and 800 degrees C. The correlation between microstructure evolution and oxidation resistance and wear resistance of as-deposited coatings are systematically discussed. (C) 2014 Elsevier B.V. All rights reserved.