X-ray photoelectron spectroscopy has been used to investigate the properties of AIN films deposited using a low temperature plasma-enhanced atomic layer deposition process. Aluminum, nitrogen and oxygen peaks were observed in the survey spectra. A thin layer of sputtered aluminum was used as a diffusion barrier, in order to distinguish between oxygen introduced during deposition and post-deposition. The results show no post-deposition oxidation. Furthermore, the samples were scanned at various depths, and the peaks were then deconvolved into the constituent subpeaks. The results show no Al-O-N bonding in the film. This result supports the models that propose that oxygen at low concentrations in AIN bonds exclusively to aluminum and forms planes of aluminum oxide octahedrons dispersed in the lattice. (C) 2014 Elsevier B.V. All rights reserved.