In this study 3-aminopropyltrimethoxysilane (APTMS) was used for the modification of single-crystal silicon wafers (1 1 1). We deposited the self-assembled layers from a solution of APTMS in five solvents with different polarities under various reaction conditions. The influence of the different solvents on the morphology of the modified surfaces was studied, since the possible heterogeneity may significantly influence the application of such surfaces. The surface composition and the chemical bonding were characterized by X-ray photoelectron spectroscopy and the morphology of the modified surfaces was investigated using atomic force microscopy and scanning electron microscopy. Our results show that the amount of coatings and the morphology of the modified surface strongly depend on the type of solvent. Silanization carried out in acetonitrile and toluene leads to the formation of a rough surface with a large density of APTMS polymerized molecules in the form of islands. The surfaces modified in N,N-dimethylformamide were smoother, with a lower density of APTMS islands. When using acetone and ethanol as a solvent we prepared a smooth, thin, modified surface, with a very low density of the APTMS islands. We discuss the influence of the polarity/nature of the solvents on the morphology of the modified surfaces. (C) 2014 Elsevier B.V. All rights reserved.