Thin film of polydimethylsiloxane (PDMS) was deposited on SiO2 nanoparticles by chemical vapor deposition, and SiO2 became completely hydrophobic after PDMS coating. Mixtures of TiO2 and PDMS-coated SiO2 nanoparticles with various relative ratios were prepared, and distributed on glass surfaces, and water contact angles and photocatalytic activities of these surfaces were studied. Samples consisting of TiO2 and PDMS-coated SiO2 with a ratio of 7:3 showed a highly stable superhydrophobicity under UV irradiation with a water contact angle of 165 and UV-driven photocatalytic activity for decomposition of methylene blue and phenol in aqueous solution. Our process can be exploited for fabricating self-cleaning surfaces with dual functionality of superhydrophobicity and photocatalytic activity at the same time. (C) 2014 Elsevier B.V. All rights reserved.